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Journal
2011 | 9 | 2 | 398-403
Article title

Investigation of the influence of low-concentration hydrogen on the surface potential of thin metallic films for sensor applications

Content
Title variants
Languages of publication
EN
Abstracts
EN
In this paper, a study of the influence of hydrogen (concentrations 6 ppm − 1%) on the work function of thin metallic films at moderately elevated temperatures is presented. The work function was measured indirectly by the observation of the surface potential of dedicated test structures using scanning surface potential microscope. Metallic layers with thicknesses of 10, 20, 30, and 50 nm were deposited on semiconductor substrates as well as on a thick gold layer. The investigations were focused on palladium thin films although a comparison to results obtained for platinum layers was also discussed.
Publisher

Journal
Year
Volume
9
Issue
2
Pages
398-403
Physical description
Dates
published
1 - 4 - 2011
online
20 - 2 - 2011
Contributors
  • Wroclaw University of Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego str. 11/17, 50-372, Wroclaw, Poland, Joanna.Prazmowska@pwr.wroc.pl
author
  • Wroclaw University of Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego str. 11/17, 50-372, Wroclaw, Poland
  • Wroclaw University of Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego str. 11/17, 50-372, Wroclaw, Poland
  • Wroclaw University of Technology, Faculty of Microsystem Electronics and Photonics, Janiszewskiego str. 11/17, 50-372, Wroclaw, Poland
References
  • [1] R. Ramachadran, R.K. Menon, Int. J. Hydrogen Energ. 23, 593 (1998) http://dx.doi.org/10.1016/S0360-3199(97)00112-2[Crossref]
  • [2] R. Duś, E. Nowicka, R. Nowakowski, Acta Phys. Pol. A 114, S–29 (2008)
  • [3] A.T. Pasteur, St.J. Dixon-Warren, Q. Ge, D.A. King, J. Chem. Phys. 106, 8896 (1997) http://dx.doi.org/10.1063/1.473953[Crossref]
  • [4] A.L. Cabrera, R. Aguayo-Soto, Catal. Lett. 45, 79 (1997) http://dx.doi.org/10.1023/A:1019078419537[Crossref]
  • [5] X. Wu, E.S. Yang, IEEE Electr. Device L. 11, 315 (1990) http://dx.doi.org/10.1109/55.56486[Crossref]
  • [6] K. Christmann, G. Eartl, T. Pignet, Surf. Sci. 54, 365 (1976) http://dx.doi.org/10.1016/0039-6028(76)90232-6[Crossref]
  • [7] Y.J. Coutts, Thin Solid Films 7, 77 (1971) http://dx.doi.org/10.1016/0040-6090(71)90028-9[Crossref]
  • [8] Y. Li, Y.T. Cheng, Int. J. Hydrogen Energ. 21, 281 (1996) http://dx.doi.org/10.1016/0360-3199(95)00094-1[Crossref]
  • [9] H. Lüth, In: H. Lüth (Ed.), Solid surfaces, interfaces and thin films (Springer-Verlag, Berlin, Heidelberg, New York, 2001) 499
  • [10] U. Laudahn et al., Appl. Phys. Lett. 74, 647 (1999) http://dx.doi.org/10.1063/1.123028[Crossref]
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.-psjd-doi-10_2478_s11534-010-0126-5
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