Plasma treatment studies of MIS devices

• Authors: Deepak Basa
• Languages of publication: EN

Abstracts

EN

Silicon nitride films have emerged as the possible future dielectrics for ultra large scale integration (ULSI). Because the interface state density of silicon nitride/silicon interface in metal insulator semiconductor (MIS) configuration is more than an order of magnitude larger than that of silicon dioxide/silicon interface, plasma treatment studies on silicon nitride films have been undertaken for the possible improvement. Accordingly, silicon nitride films of various composition have been prepared by plasma enhanced chemical vapor deposition (PECVD) system using silane(SiH4) and ammonia(NH3) with nitrogen(N2) as the diluent and MIS devices have been fabricated with as well as without plasma treated silicon nitride as the insulator. A considerable improvement in the silicon nitride/silicon interface is observed on ammonia plasma treatment while nitrous oxide(N2O) plasma treatment studies have resulted in the establishment of a novel plasma oxidation process.

Keywords

EN

silicon nitride; plasma nitridation; plasma oxidation; interface state density; elastic backscattering

• Publisher: De Gruyter Open
• Journal: Open Physics
• Year: 2010
• Volume: 8
• Issue: 3
• Pages: 400-407

Dates

published

1 - 6 - 2010

online

24 - 4 - 2010

Contributors

author

Deepak Basa

• Department of Physics, Utkal University, Bhubaneswar, 751004, India

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Identifiers

DOI

10.2478/s11534-009-0095-8