Pt coated Cr2O3 thin films for resistive gas sensors

• Authors: Aarne Kasikov , Alar Gerst , Arvo Kikas , Leonard Matisen , Agu Saar , Aivar Tarre , Arnold Rosental
• Languages of publication: EN

Abstracts

EN

The resistive response of atomic layer deposited thin epitaxial α-Cr2O3(0 0 1) films, to H2 and CO in air, was studied. The films were covered with Pt nanoislands formed by electron-beam evaporation of a sub-monolayer amount of the material. The gas measurements were performed at 250°C and 450°C. These temperatures led to different proportion of chemical states, Pt2+ and Pt4+, to which the Pt oxidized. The modification was ascertained by the X-ray photoelectron spectroscopy method. As a result of the modification, the response was fast at 250°C, but slowed at 450°C. A disadvantageous abundance of Pt4+ arising at 450°C in air could be diminished by high-vacuum annealing thus restoring the response properties of the system at 250°C.

Keywords

EN

semiconductor gas sensors; epitaxial chromia; platinum nanoislands; atomic layer deposition (ALD); X-ray photoelectron spectroscopy (XPS)

Discipline

• 07.07.Df: Sensors (chemical, optical, electrical, movement, gas, etc.); remote sensing
• 79.60.Jv: Interfaces; heterostructures; nanostructures
• 81.07.-b: Nanoscale materials and structures: fabrication and characterization(for structure of nanoscale materials, see 61.46.-w; for nanostructured materials in electrochemistry, see 82.45.Yz; see also 62.23.-c Structural classes of nanoscale systems in mechanical properties of condensed matter)
• 81.15.Kk: Vapor phase epitaxy; growth from vapor phase

• Publisher: De Gruyter Open
• Journal: Open Physics
• Year: 2009
• Volume: 7
• Issue: 2
• Pages: 356-362

Dates

published

1 - 6 - 2009

online

26 - 4 - 2009

Contributors

author

Aarne Kasikov

author

Alar Gerst

author

Arvo Kikas

• Institute of Physics, University of Tartu, Riia 142, 51014, Tartu, Estonia

author

Leonard Matisen

• Institute of Physics, University of Tartu, Riia 142, 51014, Tartu, Estonia

author

Agu Saar

• Institute of Physics, University of Tartu, Riia 142, 51014, Tartu, Estonia

author

Aivar Tarre

author

Arnold Rosental

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Identifiers

DOI

10.2478/s11534-009-0049-1