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2009 | 7 | 2 | 315-320

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Optical absorption in PECVD deposited thin hydrogenated silicon in light of ordering effects


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We report results obtained from measurements of optical transmittance spectra carried out on a series of silicon thin films deposited by plasma-enhanced chemical vapour deposition (PECVD) from silane diluted with hydrogen. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (µc-Si:H). Spectral refractive indices and absorption coefficients were determined from transmittance spectra. The spectral absorption coefficients were used to determine the Tauc optical band gap energy, the B factor of the Tauc plots, E
04 (energy at which the absorption coefficient is equal to 104 cm−1), and the Urbach energy as a function of the hydrogen dilution. The results were correlated with microstructure, namely volume fractions of the amorphous and crystalline phase with voids, and with the grain size.


  • Department of Engineering Fundamentals, Faculty of Electrical Engineering, University of Žilina, ul. kpt. J. Nálepku 1390, 031 01, Liptovský Mikuláš, Slovakia
  • Department of Materials and Technology, New Technology Research Center, University of West Bohemia, Univerzitní 8, 306 14, Plzeň, Czech Republic
  • Department of Materials and Technology, New Technology Research Center, University of West Bohemia, Univerzitní 8, 306 14, Plzeň, Czech Republic


  • [1] C. W. Wronski, R. W. Collins, Sol. Energy 77, 877 (2004) http://dx.doi.org/10.1016/j.solener.2004.03.008[Crossref]
  • [2] R. W. Collins et al., Sol. Energ. Mat. Sol. C. 78, 143 (2003) http://dx.doi.org/10.1016/S0927-0248(02)00436-1[Crossref]
  • [3] G. van Elzakker et al., Thin Solid Films 511–512, 252 (2006) http://dx.doi.org/10.1016/j.tsf.2005.12.133[Crossref]
  • [4] P. Chaudhuri et al., J. Non-Cryst. Solids 338–340, 236 (2004) http://dx.doi.org/10.1016/j.jnoncrysol.2004.02.061[Crossref]
  • [5] A. Fontcuberta et al., Phys. Rev. B 69, 125307 (2004)
  • [6] D. Gracin et al., J. Non-Cryst. Solids 354, 2286 (2008) http://dx.doi.org/10.1016/j.jnoncrysol.2007.10.076[Crossref]
  • [7] G. van Elzakker, J. Müllerová, P. Å utta, M. Zeman, Proceedings of The 22nd European Photovoltaic Solar Energy Conference, 2161 (2007)
  • [8] P. J. Lee, J. Park, E. K. Kim, Y. Lee, Opt. Express 13, 6445 (2005) http://dx.doi.org/10.1364/OPEX.13.006445[Crossref]
  • [9] J. P. Conde et al., J. Appl. Phys. 85, 3327 (1999) http://dx.doi.org/10.1063/1.369679[Crossref]
  • [10] B. P. Swain, S. B. Patil, A. Kumbhar, R. O. Dusane, Thin Solid Films 430, 186 (2003)
  • [11] A. R. Zanatta, I. Chambouleyron, Phys. Rev. B 53, 3833 (1996) http://dx.doi.org/10.1103/PhysRevB.53.3833[Crossref]
  • [12] I. Chambouleyron, J. M. Martinez, A. C. Moretti, M. Mulato, Appl. Optics 36, 8238 (1997) http://dx.doi.org/10.1364/AO.36.008238[Crossref]
  • [13] G. E. Jellison Jr., F. A. Modine, Appl. Phys. Lett. 69, 371 (1996) http://dx.doi.org/10.1063/1.118064[Crossref]
  • [14] G. E. Jellison Jr., F. A. Modine, Appl. Phys. Lett. 69, 2137 (1996) http://dx.doi.org/10.1063/1.118155[Crossref]
  • [15] J. Müllerová, V. Vavruňková, V. Å utta, R. Srnánek, Proc. SPIE, 7141, 714103 (2008)
  • [16] D. A. G. Bruggeman, Ann. Phys.-Leipzig 24, 636 (1935) http://dx.doi.org/10.1002/andp.19354160705[Crossref]
  • [17] J. Müllerová, P. Å utta, G. van Elzakker, M. Zeman, M. Mikula, Appl. Surf. Sci. 254, 3690 (2008) http://dx.doi.org/10.1016/j.apsusc.2007.10.069[Crossref]
  • [18] D. K. Basa, Thin Solid Films 406, 75 (2002) http://dx.doi.org/10.1016/S0040-6090(01)01781-3[Crossref]
  • [19] J. Niemann, W. Bauhofer, Thin Solid Films 352, 249 (1999) http://dx.doi.org/10.1016/S0040-6090(99)00320-X[Crossref]
  • [20] J. Löffler, C. Devilee, M. Geusebroek, W. J. Soppe, H.-J. Muffler, 21st European Photovoltaic Solar Energy Conference, 4–8 September 2006, Dresden, Germany, 1597
  • [21] M. Verbaan, G. van Elzakker, M. Zeman, Proc. SAFE, Veldhoven (STW Technology Foundation, Utrecht, the Netherlands, 2006) 444

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