Ultraviolet detectors based on ZnO films by thermal oxidation of Zn metallic films

• Authors: Xue Zheng , Qing Li
• Languages of publication: EN

Abstracts

EN

Metallic Zn films were deposited on glass substrates by electron-beam evaporation. ZnO films were synthesized by thermal oxidation of Zn metallic films in air. At the annealing temperature of 550 °C, ZnO nanowires appeared on the surface, which mainly result from the decrease of oxidation rate. A ZnO ultraviolet photodetector was fabricated based on a metal-semiconductor-metal planar structure. The detector showed a large UV photoresponse with an increase of two orders of magnitude. It is concluded that promising UV detectors can be obtained on ZnO films by thermal oxidation of Zn metallic films. The ways of performing spectral response measurements for polycrystalline ZnO films are also discussed.

Keywords

EN

ZnO; Ultraviolet detectors; nanowires; thermal oxidation

• Publisher: De Gruyter Open
• Journal: Open Physics
• Year: 2008
• Volume: 6
• Issue: 2
• Pages: 351-355

Dates

published

1 - 6 - 2008

online

26 - 3 - 2008

Contributors

author

Xue Zheng

• Department of Physics, Linyi Normal University, Shandong, 276005, PR China

author

Qing Li

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Identifiers

DOI

10.2478/s11534-008-0042-0