Practical precursor aspects for electron beam induced deposition

• Authors: J.J.L. Mulders
• Languages of publication: EN

Abstracts

EN

The purity of a structure made with electron
beam induced deposition (EBID) is a the major concern
when creating micro and nano-scale functionalities,
for example for rapid prototyping. Substantial research
focuses on the improvements of the purity using chemical
vapor deposition (CVD) based precursors. However, from a
practical point of view, many other aspects of a precursor
are very relevant in the design of a process and the actual
use of a tool for EBID. To a large extent, these precursorrelated
characteristics will determine whether or not
a precursor can successfully be applied. Some of these
characteristics include: vapor pressure range, transition
behavior, chemical stability, pyrolitic thresholds,
release of corrosive ligands during deposition, toxicity,
commercial availability, compatibility with the instrument
and operator safety. These characteristic are discussed
in more detail here in order to understand what an ideal
EBID precursor may be. Although some parameters
such as toxicity or flammability seem less important,
in practice they can be a road block for application unless
the main instrument, such as a regular scanning electron
microscope (SEM), is adapted accordingly.

Keywords

EN

EBID; precursor; properties

• Publisher: De Gruyter Open
• Journal: Nanofabrication
• Year: 2014
• Volume: 1
• Issue: 1

Dates

received

14 - 3 - 2014

accepted

17 - 7 - 2014

online

7 - 8 - 2014

Contributors

author

J.J.L. Mulders

• FEI Company, Achtseweg Noord 5, 5600MD Eindhoven, The Netherlands

References

• [1] Utke I., Moshkalev S., Russel P., Nanofabrication Using FocusedIon and Electron Beams, Oxford University Press, 2012, ISBN978-0-19-973421-4.
• [2] Koops H.W., Kaya A, Weber M., Fabrication and characterizationof platinum nanocrystalline material grown by electronbeaminduced deposition, J. Vac. Sci. Technol. B, 1995, 13,2400-2403.[Crossref]
• [3] Brintlinger T., Fuhrer M.S., Melngailis J., Utke I., Bret T.,Perentes A., et al., Electrodes for carbon nanotube devices byfocused electron beam induced deposition of gold, J. Vac. Sci.Technol. B, 2005, 23, 3174-3177.[Crossref]
• [4] Fernandez-Pacheo A., DeTeresa J.M., Cordoba R., Ibarra M.R.,Magnetotransport properties of high-quality cobalt nanowiresgrown by focused-electron-beam-induced deposition, J. Phys.D Appl. Phys., 2009, 42, 055005.
• [5] Wnuk J.D., Gorham J.M., Rosenberg S.G., van Dorp W.F., Madey,T.E., Hagen C.W., Fairbrother D.W., Electron Induced SurfaceReactions of the Organometallic Precursor Trimethyl(methylcyclopentadienyl)platinum(IV), J. Phys. Chem. C, 2009, 113,2487-2496.[WoS]
• [6] Botman A., Mulders J.J.L., Weemaes R., Mentink S., Purificationof platinum and gold structures after electron-beam-induceddeposition, Nanotechnology, 2006, 17, 3779-3785.[Crossref]
• [7] Kakefuda Y., Yamashita Y., Mukai K., Yoshinobu J., CompactUHV system for fabrication and in situ analysis of electronbeam deposited structures using a focused low energy electronbeam, Rev. Sci. Instrum., 2006, 77, 053702.
• [8] Belova L.M., Dahlberg E.D., Riazanova A., Mulders J.J.L.,Christophersen C., Eckert J., Rapid electron beam assistedpatterning of pure cobalt at elevated temperatures via seededgrowth, Nanotechnology, 2011, 22, 145305.[PubMed][Crossref][WoS]
• [9] Mehendale S., Mulders J.J.L., Trompenaars P.H.F., A newsequential EBID process for the creation of pure Pt structuresfrom MeCpPtMe3, Nanotechnology, 2013, 24, 145303.[Crossref][WoS]
• [10] Mulders J.J.L., Belova L.M., Raizanova A., Electron beaminduced deposition at elevated temperatures: compositionalchanges and purity improvement, Nanotechnology, 2011, 22,055302.[WoS][Crossref][PubMed]

Identifiers

DOI

10.2478/nanofab-2014-0007