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Journal
2014 | 1 | 1 |
Article title

Focused Ion Beam Processing of Superconducting
Junctions and SQUID Based Devices

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EN
Abstracts
EN
Focused ion beam (FIB) has found a steady
and growing use as a tool for fabrication, particularly
in the length-scale of micrometres down to nanometres.
Traditionally more commonly used for materials
characterisation, FIB is continually finding new research
areas in a growing number of laboratories. For example,
over the last ten years the number of FIB instruments in the
U.K. alone has gone from single figures, largely supplied
by a single manufacturer, to many tens of instruments
supplied by several competing manufacturers. Although
the smaller of the two research areas, FIB fabrication
has found itself to be incredibly powerful in the
modification and fabrication of devices for all kinds of
experimentation. Here we report our use of FIB in the
production of Superconducting QUantum Interference
Devices (SQUIDs) and other closely related devices for
metrological applications. This is an area ideally suited
to FIB fabrication as the required precision is very high,
the number of required devices is relatively low, but the
flexibility of using FIB means that a large range of smallbatch,
and often unique, devices can be constructed
quickly and with very short lead times.
Keywords
Publisher

Journal
Year
Volume
1
Issue
1
Physical description
Dates
accepted
13 - 5 - 2014
received
20 - 3 - 2014
online
7 - 7 - 2014
Contributors
author
  • Advanced Technology
    Institute, University of Surrey, Guildford, Surrey, GU2 7XH, U.K., david.cox@npl.co.uk
  • National Physical
    Laboratory, Hampton Road, Teddington, Middlesex, TW11 0LW, U.K.
  • National Physical
    Laboratory, Hampton Road, Teddington, Middlesex, TW11 0LW, U.K.
author
  • National Physical
    Laboratory, Hampton Road, Teddington, Middlesex, TW11 0LW, U.K.
References
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  • [16] Calculated using SRIM (Stopping Range of Ions in Matter).www.srim.org.
  • [17] Additional calculations using SUPRE (Surrey University SputterProfile Resolution and Energy deposition programme). www.surrey.ac.uk/ati/ibc/research/modelling_simulation/suspre.htm.
  • [18] Nanometer Pattern Generation System (NPGS). www.jcnabity.com.
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  • [24] Work currently in progress.
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.-psjd-doi-10_2478_nanofab-2014-0005
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