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Journal

2014 | 1 | 1 |

Article title

Electroless selective deposition of gold nano-array for silicon nanowires growth

Content

Title variants

Languages of publication

EN

Abstracts

EN
Nanopatterns of gold clusters on a large surface of oriented Si(111) substrates, from the galvanic displacement of gold salt (via the spontaneous reduction of AuCl4 -), are demonstrated in this work. The Si substrate is patterned by Focused Ion Beam (FIB) prior to being dipped in a gold solution. Here, we show that these patterns lead to successful control of the position and size of gold clusters. Sequential patterning reveals a powerful maskless alternative to surface preparation prior to Si nanowire growth

Publisher

Journal

Year

Volume

1

Issue

1

Physical description

Dates

published
1 - 1 - 2014
received
10 - 4 - 2013
online
10 - 9 - 2013
accepted
13 - 8 - 2013

Contributors

author
  • Institut Matériaux Microélectronique Nanosciences de Provence, UMR CNRS 7334, Aix-Marseille Université, 13397 Marseille Cedex 20, France
  • Orsay Physics, 13710 Fuveau, France
author
  • Institut Matériaux Microélectronique Nanosciences de Provence, UMR CNRS 7334, Aix-Marseille Université, 13397 Marseille Cedex 20, France
author
  • Institut Matériaux Microélectronique Nanosciences de Provence, UMR CNRS 7334, Aix-Marseille Université, 13397 Marseille Cedex 20, France
author
  • Institut Matériaux Microélectronique Nanosciences de Provence, UMR CNRS 7334, Aix-Marseille Université, 13397 Marseille Cedex 20, France
author
  • Orsay Physics, 13710 Fuveau, France
author
  • Orsay Physics, 13710 Fuveau, France
author
  • Institut Matériaux Microélectronique Nanosciences de Provence, UMR CNRS 7334, Aix-Marseille Université, 13397 Marseille Cedex 20, France
author
  • Institut Matériaux Microélectronique Nanosciences de Provence, UMR CNRS 7334, Aix-Marseille Université, 13397 Marseille Cedex 20, France

References

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Document Type

Publication order reference

Identifiers

YADDA identifier

bwmeta1.element.-psjd-doi-10_2478_nanofab-2013-0001
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