Multilayer optics for XUV spectral region: technology fabrication and applications

• Authors: S. Andreev , A. Akhsakhalyan , M. Bibishkin , N. Chkhalo , S. Gaponov , S. Gusev , E. Kluenkov , K. Prokhorov , N. Salashchenko , F. Schafers , S. Zuev
• Languages of publication: EN

Abstracts

EN

We present research investigations in the field of multilayer optics in X-ray and extreme ultra-violet ranges (XUV), aimed at the development of optical elements for applications in experiments in physics and in scientific instrumentation. We discuss normal incidence multilayer optics in the spectral region of “water window”, multilayer optics for collimation and focusing of hard X-ray, multilayer dispersing elements for X-ray spectroscopy of high-temperature plasma, multilayer dispersing elements for analysis of low Z-elements. Our research pays special attention to optimization of multilayer optics for projection EUV-lithography (ψ-13nm) and short period multilayer optics.

Keywords

EN

multilayer mirror; reflection; Spectral resolution; synchrotron radiation; X-ray tube; soft; X-ray radiation; water window; reflectometer; EUV-lithography; 07.5,41; 50; 42.79; 78.66

• Publisher: De Gruyter Open
• Journal: Open Physics
• Year: 2003
• Volume: 1
• Issue: 1
• Pages: 191-209

Dates

published

1 - 3 - 2003

online

1 - 3 - 2003

Contributors

author

S. Andreev

• Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

author

A. Akhsakhalyan

• Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

author

M. Bibishkin

• Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

author

N. Chkhalo

• Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

author

S. Gaponov

• Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

author

S. Gusev

• Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

author

E. Kluenkov

• Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

author

K. Prokhorov

• Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

author

N. Salashchenko

• Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

author

F. Schafers

• BESSY II, Albert Einstein St. 15, D-12489, Berlin, FRG

author

S. Zuev

• Institute for Physics of Microstructures RAS and X-Ray company, GSP105, 603600, Nizhny Novgorod, Russia

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Identifiers

DOI

10.2478/BF02475561