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2003 | 1 | 1 | 191-209
Article title

Multilayer optics for XUV spectral region: technology fabrication and applications

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EN
Abstracts
EN
We present research investigations in the field of multilayer optics in X-ray and extreme ultra-violet ranges (XUV), aimed at the development of optical elements for applications in experiments in physics and in scientific instrumentation. We discuss normal incidence multilayer optics in the spectral region of “water window”, multilayer optics for collimation and focusing of hard X-ray, multilayer dispersing elements for X-ray spectroscopy of high-temperature plasma, multilayer dispersing elements for analysis of low Z-elements. Our research pays special attention to optimization of multilayer optics for projection EUV-lithography (ψ-13nm) and short period multilayer optics.
Publisher
Journal
Year
Volume
1
Issue
1
Pages
191-209
Physical description
Dates
published
1 - 3 - 2003
online
1 - 3 - 2003
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Document Type
Publication order reference
YADDA identifier
bwmeta1.element.-psjd-doi-10_2478_BF02475561
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