Yttria stabilized zirconia (YSZ) thin films are obtained using both spray-pyrolysis and dip-coating. The ability of YSZ films incorporated with platinum nanospecies (Pt-YSZ) to detect oxygen is compared with that of pure YSZ thin films using a new experimental setup. With this system, the surface electrical resistance of the films as a function the oxygen content is measured at a fixed temperature. In addition, the effects of thermal annealing on the oxygen sensitivity of the films are observed. Platinum doped samples, Pt-YSZ, show different kinetics of carrier diffusion as compared to pure YSZ samples.