In this work, the differences in nanomechanical
properties, topography and morphology of carbonpalladium
(C-Pd) films were studied. These films were prepared
with a Physical Vapour Deposition method on various
substrates with different technological parameters.
We show that duration of the PVD process is a crucial factor
affecting the palladium content in these films. The differences
in thickness of films depend on the distance between
source boats and substrates. The nanomechanical
properties of C-Pd films were studied with nanoindentation.
Their topography and morphology was ascertained
with Atomic Force Microscopy and Scanning Electron Microscopy.
It was found that the mechanical properties of
C-Pd films depend on the content of palladium and on
the morphology and topography of these films. The various
types of carbon-palladium films containing palladium
nanograins incorporated in a carbon matrix that were, investigated
in this paper, seem to be promising materials for