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Journal
Open Chemistry
2015
|
13
|
1
|
Article title
Deposition of Zn-containing films using atmospheric pressure plasma jet
Authors
Oleksandr Galmiz
,
Monika Stupavska
,
Harm Wulff
,
Holger Kersten
,
Antonin Brablec
,
Mirko Cernak
Content
Full texts:
Title variants
Languages of publication
EN
Abstracts
EN
Keywords
EN
Atmospheric pressure plasma jet
film deposition
zinc
Publisher
De Gruyter Open
Journal
Open Chemistry
Year
2015
Volume
13
Issue
1
Physical description
Dates
accepted
14 - 5 - 2014
online
17 - 11 - 2014
received
30 - 1 - 2014
Contributors
author
Oleksandr Galmiz
oleksandr.galmiz@gmail.com
Dept. of Physical Electronics, Masaryk University, 61137 Brno, Czech Republic
author
Monika Stupavska
Dept. of Physical Electronics, Masaryk University, 61137 Brno, Czech Republic
author
Harm Wulff
University of Greifswald, Institute of Physics, 17489 Greifswald, Germany
author
Holger Kersten
Institute of Experimental and Applied Physics, Christian-Albrechts-Universitat zu Kiel, 24098 Kiel, Germany
author
Antonin Brablec
Dept. of Physical Electronics, Masaryk University, 61137 Brno, Czech Republic
author
Mirko Cernak
Dept. of Physical Electronics, Masaryk University, 61137 Brno, Czech Republic
References
[1] Schütze A. et al., IEEE Trans. Plasma Sci., 1998, 26(6), 1685[Crossref]
[2] Kunhardt E.E., IEEE Trans. Plasma Sci., 2000, 28(1), 189[Crossref]
[3] Laroussi M., IEEE Trans. Plasma Sci., 2002, 30(4), 1409[Crossref]
[4] Duan Y.et al., IEEE Trans. Plasma Sci., 2005, 33 (2), 328[Crossref]
[5] Yu Q.S. et al., Appl. Phys. Lett., 2006, 88(1), 013903[Crossref]
[6] Cheng C.et al., Surface & Coatings Technology, 2006, 200, 6659
[7] Noeske M. et al., International Journal of Adhesion and Adhesives, 2004, 24, 171[Crossref]
[8] Gweon B. et al., Appl. Phys. Lett., 2010, 96, 101501
[9] Tendero C. et al., Spectrochim. Acta B, 2006, 61, 2
[10] Benedikt J. et al., Appl. Phys. Lett., 2006, 89(25), 251504[Crossref]
[11] Duan Y. et al., Rev. Sci. Instrum., 2007, 78(1), 015104[Crossref]
[12] Han M.H. et al., Plasma Process. Polym., 2008, 5(9), 861[Crossref]
[13] Bornholdt S. et al., Eur. Phys. J. D, 2010, 60, 653
[14] Yang S.-H. et al., Thin Solid Films, 2009, 517, 5284
[15] Schafer J. et al., J. Phys. D: Appl. Phys., 2008, 41, 194010
[16] Schafer J. et al., Eur. Phys. J. D, 2009, 54, 211[Crossref]
[17] Ha H.-K. et al., Appl. Phys. Lett., 1996, 68(21), 2965[Crossref]
[18] Maruyama K. et al., J. Mater. Sci. Lett., 2001, 20(5), 481[Crossref]
[19] Penkov O.V. et al., Thin Solid Films, 2010, 518(22), 6160[Crossref]
[20] Suzaki Y. et al., Thin Solid Films, 2006, 506–507, 155
[21] Kim D.H. et al., J. Electrochem. Soc., 2007, 154(11), H939[Crossref]
[22] Yamada T. et al., Appl.Phys. Lett., 2007, 91(5), 051915[Crossref]
[23] Ramamoorthy K. et al., Opt. Commun., 2006, 262(1), 91
[24] Bhosle V.et al., J. Appl. Phys., 2006, 100(3), 033713[Crossref]
[25] Volintiru I. et al., J. Appl. Phys., 2007, 102(4), 043709[Crossref]
[26] Lin C.-C. et al., Chemical Physics Letters, 2005, 404, 30
[27] Irzh A., Langmuir, 2010, 26(8), 5976[Crossref]
[28] Chang K.-M. et al., Thin Solid Films, 2011, 519, 5114
[29] Samukawa S.et al., J. Phys. D: Appl. Phys., 2012, 45, 253001
[30] Foest R. et al., Contrib. Plasma Phys., 2007, 47, 119
[31] Erikson L., Louer D., Werner P.E., J. Solid State Chem., 1989, 81, 9
[32] Staehlin W., Ostwald H.R., Acta Crystallographia, 1979, 26, 860[Crossref]
[33] Crist B.V., Handbook of Monochromatic Xps Spectra, vol. 2, Commercially Pure Binary Oxides, XPS International Inc., 754 Leona Lane, Mountain View, California, 94040, USA, 1999, 818-827
[34] Baltrusaitis J. et al., Phys. Chem. Chem. Phys., 2009, 11, 8295-8305 [Crossref]
Document Type
Publication order reference
Identifiers
DOI
10.1515/chem-2015-0020
YADDA identifier
bwmeta1.element.-psjd-doi-10_1515_chem-2015-0020
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