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Number of results

Journal

2015 | 13 | 1 |

Article title

Deposition of Zn-containing films using atmospheric pressure plasma jet

Content

Title variants

Languages of publication

EN

Abstracts

EN

Publisher

Journal

Year

Volume

13

Issue

1

Physical description

Dates

accepted
14 - 5 - 2014
online
17 - 11 - 2014
received
30 - 1 - 2014

Contributors

  • Dept. of Physical Electronics, Masaryk University, 61137 Brno, Czech Republic
  • Dept. of Physical Electronics, Masaryk University, 61137 Brno, Czech Republic
author
  • University of Greifswald, Institute of Physics, 17489 Greifswald, Germany
  • Institute of Experimental and Applied Physics, Christian-Albrechts-Universitat zu Kiel, 24098 Kiel, Germany
  • Dept. of Physical Electronics, Masaryk University, 61137 Brno, Czech Republic
author
  • Dept. of Physical Electronics, Masaryk University, 61137 Brno, Czech Republic

References

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  • [4] Duan Y.et al., IEEE Trans. Plasma Sci., 2005, 33 (2), 328[Crossref]
  • [5] Yu Q.S. et al., Appl. Phys. Lett., 2006, 88(1), 013903[Crossref]
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  • [8] Gweon B. et al., Appl. Phys. Lett., 2010, 96, 101501
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  • [11] Duan Y. et al., Rev. Sci. Instrum., 2007, 78(1), 015104[Crossref]
  • [12] Han M.H. et al., Plasma Process. Polym., 2008, 5(9), 861[Crossref]
  • [13] Bornholdt S. et al., Eur. Phys. J. D, 2010, 60, 653
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  • [15] Schafer J. et al., J. Phys. D: Appl. Phys., 2008, 41, 194010
  • [16] Schafer J. et al., Eur. Phys. J. D, 2009, 54, 211[Crossref]
  • [17] Ha H.-K. et al., Appl. Phys. Lett., 1996, 68(21), 2965[Crossref]
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  • [20] Suzaki Y. et al., Thin Solid Films, 2006, 506–507, 155
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  • [26] Lin C.-C. et al., Chemical Physics Letters, 2005, 404, 30
  • [27] Irzh A., Langmuir, 2010, 26(8), 5976[Crossref]
  • [28] Chang K.-M. et al., Thin Solid Films, 2011, 519, 5114
  • [29] Samukawa S.et al., J. Phys. D: Appl. Phys., 2012, 45, 253001
  • [30] Foest R. et al., Contrib. Plasma Phys., 2007, 47, 119
  • [31] Erikson L., Louer D., Werner P.E., J. Solid State Chem., 1989, 81, 9
  • [32] Staehlin W., Ostwald H.R., Acta Crystallographia, 1979, 26, 860[Crossref]
  • [33] Crist B.V., Handbook of Monochromatic Xps Spectra, vol. 2, Commercially Pure Binary Oxides, XPS International Inc., 754 Leona Lane, Mountain View, California, 94040, USA, 1999, 818-827
  • [34] Baltrusaitis J. et al., Phys. Chem. Chem. Phys., 2009, 11, 8295-8305 [Crossref]

Document Type

Publication order reference

Identifiers

YADDA identifier

bwmeta1.element.-psjd-doi-10_1515_chem-2015-0020
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